The KLA-Tencor P-6 Profiler is a highly sensitive surface profiler that measures step height, roughness, and waviness on sample surfaces. Roughness can be measured with up to a 0.5 Å resolution over short distances. Waviness can be measured over the entire surface of a sample (assuming a sample size within the system’s scan limits). The P-6 Profiler system uses stylus-based scanning to achieve high resolution and can correlate local submicron features with global surface measurements. It has a scan area of 200 X 200 mm.