Sputter Deposition System - Equipment - Equipment
Equipment

Sputter Deposition System

Date:01-29-2015    Hits:1187

超高真空磁控溅射镀膜机 

Sputter Deposition System (MDT-1;MDT-2;MDT-3) 


MDT-1: Ultra high vacuum magnetic sputtering system with 8 inch wafer and angstrom film deposition capability. The system includes 10 cathodes with multi-target deposition capability, and it can process up to 100 layers. Also this system has high temperature capability of up to 700.


MDT-2: Ultra high vacuum magnetic sputtering system with 8 inch wafer and angstrom film deposition capability. The system includes 10 cathodes with multi-target deposition capability, and it can process up to 100 layers.


MDT-3: Ultra high vacuum magnetic sputtering system with 8 inch wafer and angstrom film deposition capability. The system includes 10 cathodes with multi-target deposition capability, and it can process up to 100 layers.


  超高真空磁控溅射镀膜机 2号机


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